http://www.micro.mavt.ethz.ch/education/index.htm
Projekttyp: e-Learning
Keywords: Group oriented hands-on practical lab, Acquisition of cutting edge technology, Thin film processes, Super critical point drying, Submicron structures, Silicon Process Technology, Plasma assisted high aspect ratio etching, Picofarad capacitive readout, Microsystem Technology, MEMS, Highly parallel processing, Cleanroom technology

The ?Embedded MEMS Lab?, designed and implemented by the Chair of Micro- and Nanosystems, is a laboratory course in micro-electro-mechanical systems. It constitutes a major contribution to the teaching activities at ETH Zurich by providing a missing link in the growing field of micro and nanosystems technology.

The course will provide advanced students from the departments of Mechanical and Process Engineering, Physics, and Information Technology and Electrical Engineering with expertise guidance so that they are able to process and fabricate a micromechanical system with readout electronics on their own. The course is highly motivating for the students as they gain experience in an important future technology where interdisciplinary and teamwork skills are in high demand. The course will also stand out in comparison with the offers from other leading universities.

Meilensteine:
2003/02/01		Project start
2003/06/01		Festlegen des Praktikumszieles
2004/02/01		Erstellte Systeme getestet und geprüft
2004/03/01		Anzahl: Teilnehmer (prozesslimitiert)
2004/07/31		Praktikum 2004
2005/10/31		Project end